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The effect of nickel on the strain evolution in chemical copper films
Simon Bamberg, Laura K. Perry, Bruce Muir, Alaaedeen Abuzir, Frank Brüning, Ralf BrüningVolume:
520
Année:
2012
Langue:
english
DOI:
10.1016/j.tsf.2012.07.039
Fichier:
PDF, 1.03 MB
english, 2012