Plasma diagnostics of an Ar/NH3 direct-current reactive magnetron sputtering discharge for SiNx deposition
F. Henry, C.Y. Duluard, A. Batan, F. ReniersVolume:
520
Année:
2012
Langue:
english
DOI:
10.1016/j.tsf.2012.06.048
Fichier:
PDF, 937 KB
english, 2012