Structural and electrical characteristics of highly textured oxidation-free Ru thin films by DC magnetron sputtering
Hu-Yong Tian, Yu Wang, Helen-Lai-Wa Chan, Chung-Loong Choy, Kwang-Soo NoVolume:
392
Année:
2005
Langue:
english
DOI:
10.1016/j.jallcom.2004.09.041
Fichier:
PDF, 297 KB
english, 2005