Surface Passivation of Silicon by Electrochemically Formed Oxide Layers
E. Neburchilova, A. Osipov, L. Rubin, T. Wardle, W. ZhuVolume:
27
Année:
2012
Langue:
english
Pages:
1
DOI:
10.1016/j.egypro.2012.07.079
Fichier:
PDF, 574 KB
english, 2012