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Influence of multi-hit capability on quantitative measurement of NiPtSi thin film with laser-assisted atom probe tomography
T. Kinno, H. Akutsu, M. Tomita, S. Kawanaka, T. Sonehara, A. Hokazono, L. Renaud, I. Martin, R. Benbalagh, B. Sallé, S. TakenoVolume:
259
Année:
2012
Langue:
english
Pages:
1
DOI:
10.1016/j.apsusc.2012.07.108
Fichier:
PDF, 923 KB
english, 2012