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In situ investigation of amorphous silicon-silicon dioxide interfaces by infrared ellipsometry
R. Ossikovski, H. Shirai, B. DrévillonVolume:
164-166
Année:
1993
Langue:
english
Pages:
829
DOI:
10.1016/0022-3093(93)91124-l
Fichier:
PDF, 269 KB
english, 1993