Impact of oxygen bonding on the atomic structure and photoluminescence properties of Si-rich silicon nitride thin films
Nguyen, P. D., Kepaptsoglou, D. M., Ramasse, Q. M., Sunding, M. F., Vestland, L. O., Finstad, T. G., Olsen, A.Volume:
112
Année:
2012
Langue:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4756998
Fichier:
PDF, 5.21 MB
english, 2012