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Application of image spectrometer to in situ infrared broadband optical monitoring for thin film deposition
Cai, Qing-Yuan, Zheng, Yu-Xiang, Zhang, Dong-Xu, Lu, Wei-Jie, Zhang, Rong-Jun, Lin, Wei, Zhao, Hai-Bin, Chen, Liang-YaoVolume:
19
Année:
2011
Langue:
english
Journal:
oe/19/14/oe-19-14-12969.pdf
DOI:
10.1364/OE.19.012969
Fichier:
PDF, 1.01 MB
english, 2011