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Five beam holographic lithography for simultaneous fabrication of three dimensional photonic crystal templates and line defects using phase tunable diffractive optical element
Lin, Yuankun, Harb, Ahmad, Lozano, Karen, Xu, Di, Chen, K. P.Volume:
17
Année:
2009
Langue:
english
Journal:
oe/17/19/oe-17-19-16625.pdf
DOI:
10.1364/OE.17.016625
Fichier:
PDF, 336 KB
english, 2009