Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter for measurement of thickness and surface profile of a thin film
Akiyama, Hisashi, Sasaki, Osami, Suzuki, TakamasaVolume:
13
Année:
2005
Langue:
english
Journal:
oe/13/25/oe-13-25-10066.pdf
DOI:
10.1364/OPEX.13.010066
Fichier:
PDF, 1.22 MB
english, 2005