Obtaining TiO2 optical films by reactive ac magnetron sputtering
Vol'pyan, O. D., Yakovlev, P. P., Meshkov, B. B., Obod, Yu. D.Volume:
68
Année:
2001
Langue:
english
Journal:
jot/68/7/jot-68-7-484.pdf
DOI:
10.1364/JOT.68.000484
Fichier:
PDF, 42 KB
english, 2001