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Discrepancies between roughness measurements obtained with phase-shifting and white-light interferometry
Rhee, Hyug-Gyo, Vorburger, Theodore V., Lee, Jonathan W., Fu, JosephVolume:
44
Année:
2005
Langue:
english
Journal:
ao/44/28/ao-44-28-5919.pdf
DOI:
10.1364/AO.44.005919
Fichier:
PDF, 282 KB
english, 2005