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Analysis of water diffusion path evolving from silicon dioxide and its influence on transistor hump
Jung-Hwan Lee, Won-Kyu Park, Eun-Young Chung, Young-Hee Kim, Chang-Kyu ChoiVolume:
53
Année:
2006
Langue:
english
Pages:
7
DOI:
10.1109/ted.2006.871192
Fichier:
PDF, 272 KB
english, 2006