IIB-3 aluminum alloys with titanium, tungsten, and copper for multilayer interconnections
Gardner, D., Michalka, T., Saraswat, K., McVittie, J., Barbee, T., Meindl, J.Volume:
31
Année:
1984
Langue:
english
Pages:
1
DOI:
10.1109/t-ed.1984.21835
Fichier:
PDF, 166 KB
english, 1984