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Effect of evaporation and mixing technique on die spacer thickness: A preliminary study
Jason J. Psillakis, Mona E. McAlarney, Robert F. Wright, Javier UrquiolaVolume:
85
Année:
2001
Langue:
english
Pages:
6
DOI:
10.1067/mpr.2001.113028
Fichier:
PDF, 88 KB
english, 2001