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Mass-loading effect on quality factor of floppy silicon microcantilever in free air space
Yong Liu, Gang Zhao, Li Wen, Xingzhong Xu, Jiaru ChuVolume:
6
Année:
2011
Langue:
english
DOI:
10.1049/mnl.2010.0184
Fichier:
PDF, 232 KB
english, 2011