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Lowering aspect ratio of patterned islands to achieve ultrahigh storage densities
Na Helian, Frank Z. Wang, Warwick W. CleggVolume:
233
Année:
2001
Langue:
english
Pages:
6
DOI:
10.1016/s0304-8853(01)00194-9
Fichier:
PDF, 161 KB
english, 2001