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Study on thermal crosslinking reaction of o-naphthoquinone diazides and application to electrodeposition positive photoresist
Kenji Miyagawa, Keisuke Naruse, Shinsuke Ohnishi, Koji Yamaguchi, Kenji Seko, Nobushige Numa, Naozumi IwasawaVolume:
42
Année:
2001
Langue:
english
Pages:
9
DOI:
10.1016/s0300-9440(01)00155-2
Fichier:
PDF, 301 KB
english, 2001