Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1999 Vol. 148; Iss. 1-4
Residual stresses and ion implantation effects in Cr thin films
A Misra, S Fayeulle, H Kung, T.E Mitchell, M NastasiVolume:
148
Année:
1999
Langue:
english
Pages:
5
DOI:
10.1016/s0168-583x(98)00780-0
Fichier:
PDF, 188 KB
english, 1999