Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1998 Vol. 144; Iss. 1-4
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Deposition of carbon thin films by free electron laser
Masayuki Okoshi, Mitsugu Hanabusa, Shinji OkumaVolume:
144
Année:
1998
Langue:
english
Pages:
5
DOI:
10.1016/s0168-583x(98)00304-8
Fichier:
PDF, 151 KB
english, 1998