Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1997 Vol. 129; Iss. 4
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Annealing of radiation defects in helium-implanted SiSiO2 structures
S. Kaschieva, P. DaneshVolume:
129
Année:
1997
Langue:
english
Pages:
3
DOI:
10.1016/s0168-583x(97)00318-2
Fichier:
PDF, 303 KB
english, 1997