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In situ analysis of surface photoabsorption spectra during InP ALE in metal organic chemical vapor deposition
Young Dong Kim, Min Soo Lee, Tae-Wan Lee, Heedon Hwang, Sukho Yoon, Youngboo Moon, Euijoon YoonVolume:
51-52
Année:
2000
Langue:
english
Pages:
8
DOI:
10.1016/s0167-9317(99)00459-1
Fichier:
PDF, 182 KB
english, 2000