Ellipsometric investigation of the Si/SiO2 interface formation for application to highly reflective dielectric mirrors
B Gallas, S Fisson, A Brunet-Bruneau, G Vuye, J RivoryVolume:
377-378
Année:
2000
Langue:
english
Pages:
6
DOI:
10.1016/s0040-6090(00)01383-3
Fichier:
PDF, 204 KB
english, 2000