Unpackaged infrared thermoelectric microsensor realised on suspended membrane by silicon technology
Charles Sion, Pascale Godts, Katir Ziouche, Zahia Bougrioua, Tuami Lasri, Didier LeclercqVolume:
175
Année:
2012
Langue:
english
Pages:
9
DOI:
10.1016/j.sna.2011.12.051
Fichier:
PDF, 1.28 MB
english, 2012