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Wafer mapping of the transverse piezoelectric coefficient, e31,f, using the wafer flexure technique with sputter deposited Pt strain gauges
Rudeger H.T. Wilke, Paul J. Moses, Pierre Jousse, Charles Yeager, Susan Trolier-McKinstryVolume:
173
Année:
2012
Langue:
english
Pages:
6
DOI:
10.1016/j.sna.2011.10.030
Fichier:
PDF, 730 KB
english, 2012