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Effect of film thickness and annealing temperature on hillock distributions in pure Al films
Soo-Jung Hwang, Je-Hun Lee, Chang-Oh Jeong, Young-Chang JooVolume:
56
Année:
2007
Langue:
english
Pages:
4
DOI:
10.1016/j.scriptamat.2006.09.001
Fichier:
PDF, 397 KB
english, 2007