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Direct fabrication of two-dimensional photonic crystal structures in silicon using positive and negative Hydrogen Silsesquioxane (HSQ) patterns
Bashar Hamza, Anand Kadiyala, Lawrence A. Hornak, Yuxin Liu, Jeremy M. DawsonVolume:
91
Année:
2012
Langue:
english
Pages:
5
DOI:
10.1016/j.mee.2011.10.004
Fichier:
PDF, 1.12 MB
english, 2012