Processing issues in silicon nanocrystal manufacturing by ultra-low-energy ion-beam-synthesis for non-volatile memory applications
P. Normand, P. Dimitrakis, E. Kapetanakis, D. Skarlatos, K. Beltsios, D. Tsoukalas, C. Bonafos, H. Coffin, G. Benassayag, A. Claverie, V. Soncini, A. Agarwal, Ch. Sohl, M. AmeenVolume:
73-74
Année:
2004
Langue:
english
Pages:
6
DOI:
10.1016/j.mee.2004.03.043
Fichier:
PDF, 281 KB
english, 2004