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Effect of deposition temperature on microstructure and corrosion resistance of ZrN thin films deposited by DC reactive magnetron sputtering
Daiane Roman, Juliane Bernardi, Cintia L.G. de Amorim, Fernando S. de Souza, Almir Spinelli, Cristiano Giacomelli, Carlos A. Figueroa, Israel J.R. Baumvol, Rodrigo L.O. BassoVolume:
130
Année:
2011
Langue:
english
Pages:
7
DOI:
10.1016/j.matchemphys.2011.06.013
Fichier:
PDF, 939 KB
english, 2011