Metallorganic chemical vapor deposition of metallic Ru thin films on biaxially textured Ni substrates using a Ru(EtCp)2 precursor
Hu-Yong Tian, Helen-Lai-Wa Chan, Chung-Loong Choy, Jong-Wan Choi, Kwang-Soo NoVolume:
93
Année:
2005
Langue:
english
Pages:
7
DOI:
10.1016/j.matchemphys.2005.03.002
Fichier:
PDF, 512 KB
english, 2005