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Performance optimization of a high-repetition-rate KrF laser plasma x-ray source for microlithography
Fred Bijkerk, Eric Louis, Marnix J. van der Wiel, Edmond C.I. Turcu, Greg J. Tallents, Dimitri BataniVolume:
3
Année:
1992
Langue:
english
Pages:
19
DOI:
10.1016/0895-3996(92)90005-5
Fichier:
PDF, 1.41 MB
english, 1992