Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1994 Vol. 85; Iss. 1-4
RBS and recoil spectrometry analysis of CoSi2 formation on GaAs
Mikael Hult, Harry J. Whitlow, Mikael Östling, Nils Lundberg, Carina Zaring, David D. Cohen, Nick Dytlewski, Peter N. Johnston, Scott R. WalkerVolume:
85
Année:
1994
Langue:
english
Pages:
5
DOI:
10.1016/0168-583x(94)95950-1
Fichier:
PDF, 510 KB
english, 1994
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