Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1990 Vol. 44; Iss. 4

Simulation of doping of deep trenches by ion implantation
S. Saler, R. Kassing, R. KakoschkeVolume:
44
Année:
1990
Langue:
english
Pages:
6
DOI:
10.1016/0168-583x(90)90008-i
Fichier:
PDF, 606 KB
english, 1990