Emission measurement and safety assessment for the production process of silicon nanoparticles in a pilot-scale facility
Jing Wang, Christof Asbach, Heinz Fissan, Tim Hülser, Heinz Kaminski, Thomas A. J. Kuhlbusch, David Y. H. PuiVolume:
14
Langue:
english
DOI:
10.1007/s11051-012-0759-y
Date:
March, 2012
Fichier:
PDF, 775 KB
english, 2012