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Analysis and Kinetics of Transient Species in Electrode Near Plasma and Plasma Boundary Sheath of RF Plasmas in Molecular Gases
M. Geigl, S. Peters, O. Gabriel, B. Krames, J. MeichsnerVolume:
45
Année:
2005
Langue:
english
Pages:
9
DOI:
10.1002/ctpp.200510042
Fichier:
PDF, 297 KB
english, 2005