
Electron kinetics in dc argon microplasmas
Chang, Hyonu, Ryu, Chang-Mo, Yoo, Suk Jae, Kim, Seong Bong, You, Shin JaeVolume:
45
Année:
2012
Langue:
english
DOI:
10.1088/0022-3727/45/19/195206
Fichier:
PDF, 824 KB
english, 2012