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[IEEE 2009 IEEE International Conference on 3D System Integration (3DIC) - San Francisco, CA, USA (2009.09.28-2009.09.30)] 2009 IEEE International Conference on 3D System Integration - First integration of Cu TSV using die-to-wafer direct bonding and planarization
Leduc, Patrick, Assous, Myriam, Di Cioccio, Lea, Zussy, Marc, Signamarcheix, Thomas, Roman, Ant, Rousseau, Maxime, Verrun, Sophie, Bally, Laurent, Bouchu, David, Cadix, Lionel, Farcy, Alexis, Sillon,Année:
2009
Langue:
english
Pages:
5
DOI:
10.1109/3dic.2009.5306602
Fichier:
PDF, 753 KB
english, 2009