The electron-energy distribution function in a shielded argon radiofrequency inductive discharge
Godyak, V A, Piejak, R B, Alexandrovich, B MVolume:
4
Année:
1995
Langue:
english
Pages:
5
DOI:
10.1088/0963-0252/4/3/002
Fichier:
PDF, 402 KB
english, 1995