[Electronic Materials: Science and Technology] Electroceramic-Based MEMS Volume 9 || Low-Cost Patterning of Ceramic Thin Films
Setter, NavaVolume:
10.1007/b1
Année:
2005
Langue:
english
Pages:
24
DOI:
10.1007/0-387-23319-9_15
Fichier:
PDF, 363 KB
english, 2005