Kinetic model for dependence of thin film stress on growth rate, temperature, and microstructure
Chason, E., Shin, J. W., Hearne, S. J., Freund, L. B.Volume:
111
Année:
2012
Langue:
english
DOI:
10.1063/1.4704683
Fichier:
PDF, 825 KB
english, 2012