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COMPARISON OF STRESS RELIEF MECHANISMS OF METAL FILMS DEPOSITED ON LIQUID SUBSTRATES BY THERMAL EVAPORATING AND SPUTTERING
YU, SEN-JIANG, ZHANG, YONG-JU, CHEN, MIAO-GENVolume:
24
Année:
2010
Langue:
english
DOI:
10.1142/s0217979210054531
Fichier:
PDF, 2.18 MB
english, 2010