Nanopatterning of diamond films with composite oxide mask of metal octylates in electron beam lithography
Shuji Kiyohara, Hideaki Takamatsu, Taku Motoishi, Katsumi MoriVolume:
15
Langue:
english
Pages:
4
DOI:
10.1023/b:jmse.0000005384.49423.0e
Date:
February, 2004
Fichier:
PDF, 227 KB
english, 2004