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Microfabricated Plastic Devices from Silicon Using Soft Intermediates
A. Peter Russo, Dace Apoga, Natalie Dowell, William Shain, Andrea M. P. Turner, Harold G. Craighead, Harvey C. Hoch, James N. TurnerVolume:
4
Langue:
english
Pages:
7
DOI:
10.1023/a:1020902106144
Date:
December, 2002
Fichier:
PDF, 802 KB
english, 2002