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Effects of deposition conditions on physical properties and stresses of Pt and (Al, Si)Ox thin films
Jae-Suk Lee, Jong-Wan Park, Joon-Shik Park, Hyo-Derk Park, Sang-Mo ShinVolume:
16
Langue:
english
Pages:
5
DOI:
10.1023/a:1018560826654
Date:
June, 1997
Fichier:
PDF, 3.48 MB
english, 1997